Thermal evaporation is a popular physical vapor deposition (PVD) technique due to its simplicity. During this process, a source material which is to be deposited on any object (substrate) is heated to its evaporation point by joule heating of the resistive boat made up of tungsten or molybdenum in a high vacuum environment. The vaporized material then travels from the source to the substrate where they nucleate together to form a thin film coating. Thermal evaporation deposits both metals and nonmetals having their melting points below 1500 deg. C. These technique deposits thin films in the thickness range of angstroms to microns and can be a single material, or can be multiple materials in a layered structure.
Applications:
Thermal evaporation technique is useful in micro fabrication process, thin film composites, optical coatings (photovoltaic), protective coatings, insulating/conductive coatings. It is being used to fabricate shape memory alloy thin films on flexible substrates for actuator and sensor applications in MEMS and soft robotics.
This equipment is very much useful for UG/PG/PhD Students to carry out their projects in the field of thin film and coatings. This equipment is installed in MME Workshop.
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